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HP 4084B Operation Manual
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HP 4084B Operation Manual

HP 4084B Operation Manual

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  • Page 1 T h e t e s t & me a s u r e me n t e q u i p me n t y o u n e e d a t t h e p r i c e y o u w a n t . A l l t e s t I n s t r u me n t s , I n c .
  • Page 2 "' '" " � OPERAT M ANUAL • > 4 0 8 5 M SWITCHING MATRIX' ...• .. • e. H EWLETT PACKARD...
  • Page 3 Verso Filler Page...
  • Page 4 HEWLETT PACKARD OPERATION MANUAL MODEL 4085M © COPYRIGHT: YOKOGAWA·HEWLETT-PACKARO. LTD . 1984 9-1. TAKAKURA-CHO, HACHIOJI-SHI. T OKYO, JAPAN Manual Part No. 04085-90000 Printed: JUL. 1984 Microfiche Part No. 04085-90050...

  • Page 5: Table Of Contents

    • • . • • • • . • • •. . • •• • • 3-13 3-31. Relay Protection ••• •••• • • • • • • • • 3-33. HP-IB AODRESS 3-13 • • . . • • • •• • •. . . •• • . 3-1 4 3-35.
  • Page 6 Relationship Between Ports and Relays . • • • • • • • • • • • • • ..• 3-3. HP-IB Address ....3-14 3-4. Port Address Functions • • . • . • • • .

  • Page 7: General Information

    HP M odel 4145A Semiconductor Parameter Analyzer and the HP M odel 9 8 1 6 or 9836 Desktop Computer." If you're not familiar with the 4 1 45 A and at least one of these computers, you should read the manuals "...

  • Page 8: System Configuratio

    HP Model 4085A Switching Matrix. The 4085M is designed for systemization with the HP Model 4 1 4 5 A Semiconductor Parameter Analyzer and the HP M odel 9 8 1 6 or 9836 Desktop Computer. Figure 1-2 shows the basic configuration of the system. This system can m easure and characterize the dc parameters of virtually any low-to-medium power semiconductor device, whether on the wafer or packaged.

  • Page 9: Specifications

    1-10. The 9 8 1 6 or 9836 Desktop Computer provides overall control- of the 4084A and 4145A via the HP-IB. HP BASIC .language programs can be written to implement any system capability. Refer to the BASIC language reference m anuals furnished with the 9 8 1 6 and 9836 for complete details.
  • Page 10 ;fii M odel 8 5 M Section I SERIAL NO. 4085 M's serial number Instrument's serial number Figure Serial N u m bers 1-3. 1 -4...
  • Page 12 Section I Mocte1 4 0S5M Table 1-2. Supplem ental Performance Char a cteristics (Sheet I of 3) . REFERENCE DATA Reference data are typical performance characteristics of the · 4 1 4 5 A Semiconductor Parameter Analyzer and the 40S5M SWitching Matrix combined into a system. Reference data are given for inform ation purposes and should not be considered guaranteed specifications.

  • Page 14: Supplemental Performance

    M ode1 4085 M Section Table 1-2. Supplemental Performance Characteristics (Sheet 3 of 3) VS PORT: Accuracy: Output Max . Voltage .full Scale Current Accuracy' Resolution Range IOmA ±O.S% ±IOmV ±2OV ±. OOIV Residual Resistance : 1 .4Q Maximum Capacitive Load: 200pF V M PORT: Accuracy: Input...

  • Page 15: Accessories Supplied

    4085M. Table 1 -3 lists all available accessories and provides brief description of each. 1 -27. Additional pin boards-for replacement or to augment the number of pin boards possible with options 0 0 1 , 002, 003, and 004-can be purchased. Order the HP 16320A Pin Board.

  • Page 16: Accessories Available

    Section I M ode1 4085M Table 1-3. Accessories Available (Sheet 1 of 2) " 1 6 066A Test Fixture Adapter (furn i � hed)' : The 1 6 066A Test Fixture Adapter has a light-tight cover that provides electrostatic shielding to ensure stable, accurate m easurement of extremely low currents.
  • Page 17 Section I M odel 4085M Table 1-3. Accessories Available (Sheet 2 of 2) 1 60 7 0 A General Purpose DIP Fixture � � .(::'::; .: , > : .. ' The 1 6 070A General Purpose DIP fixture is designed to accept a variety of dual-in-line packaged devices of 48 pins or less.
  • Page 18 Section I Mode1 4085M �� " !, ... � "$ -u:I � Figure 1-4_ Dim ensions of 4085A 1 - 1 2...

  • Page 19: Installation

    Model 4085M Section II " , ' ��.-'" ..SECTION INSTAL LATION 2-1. I N TRODUCTIO N 2-2. This section provides the instructions, procedures, and information necessary to install the Model 4085M Sw itching Matrix. Figure 2-1 shows, in flow diagram fashion, the steps required to install the 4085M.

  • Page 20: Installation Of Additional Pin Boards

    M odel 4D85M_ Section-l\ 2-5. When shipped from -the factory, the 4D85A is wrapped in two sheets of separate- vinyl. After removing the 4D85A from its carton, remove only the outer sheet of vinyl. Leave the inner sheet in place until the 4D85A has been moved to the clean room. If additional pin boards were ordered, they will be enclosed in individual antistatic envelopes.

  • Page 21: Pin Board Handling

    Section 1I M odel 4085M Figure 2-2. Pin Board Installation :·r , �. Figure 2-3. Pin Board Handling 42 ....32 Pin board KO.! ,� 8·" ....18 Figure 2-4.

  • Page 22: Interconnections

    4084A: 2 2 4145A: 17 If other HP-IB addresses are used, or if an HP-I B interface card is used instead of the computer's internal HP-IB interface, the furnished software m ust be m odified, as described in paragraph 3-32.
  • Page 23 4085A Switching Matrix Control Cable, PN 04085-61671 (furnished with the 4085M) 4084A Switching Matrix Controller 1 0 833A/B/C/D HP-lB Cables 2 ea. 9836 or 9 8 1 6 Desktop Computer 4 1 4 5 A Semiconductor Parameter Analyzer Shorting Connector, P N 04145-61623 (furnished with the 4145A) B N C Cables, 4 ea., P N 041 45-6 1 6 3 0 (furnished with the 4145A)

  • Page 24: Power Cable

    (G ROUNDIN G). 2-1 7. Figure 2-7 shows the available power cords used in various countries, including the standard power cord furnished with the instrument. HP part number, applicable..stan dards for power plug, power cord color, electrical characteristics and countries using each power cord are listed in the figure.
  • Page 25 Model 4 085M United Kingdom OPTION 900 OPTION 901 Australia/New Zealand Line Line Plug: NZSS 198/AS C1l2, 250V Plug: BS 1363A, 250V Cable: HP 8120-1369 Cable: HP 8120-1351 European Continent . U.S./canada OPTION 902 OPTION 903 Earth Earth � ---- -- - �...

  • Page 26: Performance Verification

    Section II M odel 4085M 2-1 8. PERFORMA NCE VERIFICATIO N ' 2-1 9 . After all interconnections, switch settings, and power line connections haVe been performance using the furnished diagnostics software. ' Complete made, verify instructions are given in paragraph 4-3. When shipped from the factory, "the 4085M m eets' all the specifications listed in Table I-I.

  • Page 27: Rack Mount Kit

    Section 1I M ode l 4085M c . Use a strong shipping container. A double-walled carton made of 3 5 0-pound test m aterial is adequate. d. Use enough shock absorbing material (3 to 4-inch layer) around all sides of the instrum "...

  • Page 28: Operation

    Model 408 5 M Section SECTION III OPERATIO N 3-1 . I N TRODUCTIO N 3-2. This section provides the hardware and software"elated information necessary to operate the 4085M. Figure 3-1 shows the organization of the section and provides a brief description of each part.
  • Page 29 - condition. LOCAL/TEST Key and Indicator: Pressing this key while the R M T HP-lB indicator lamp is lit (4084A is under remote control) sets the 4084A to local control (RMT lamp goes off). Pressing this key while the 4084A is set to local control starts the RELAY TEST. The indicator lam p at the center of the key lights during the RELAY TEST.

  • Page 30: Rear Panel Features Of 4084A

    Section M odel 408SM .. __ ..HP-lB Connector : Twenty-four pin connector that connects the 4084A to the HP-lB. HP-lB Address Switch : This switch sets the 4084 A's HP-lB address (0-30). GROU N D Terminal : This terminal is tied to the 4084A's chassis ground.

  • Page 31: Panel Features Of The 4085A

    Model 4085M Section Handle : Used to lower and raise the 4085A when the 4085A is attached to a wafer prober. WAR NING THE 4085A IS HEAVY, APPROXIM ATELY 22kg (48 lb.). RAISI NG SURE HANDLE WHEN A N D LO' WERING THE 4085A.

  • Page 32: Measurement Pins

    Model 4085M Section , lII Measurement Pins : The m easurement pins are spring-loaded and press against the contacts of a test fixture or the contact pads of a personp. l ity board attached to a wafer prober. CAUTION NOT TOUCH M EASUREM E N T PI N S WITH BARE...

  • Page 33: Measurement Ports

    Model 4085M Section 3-5. THEORY OF OPERATION �.' ..�� . . ---' -' ..The basic operating theory of the 4085M is described in paragraphs 3-7 through , 3-6. 3-18. A thorough understanding of the information presented in t�ese paragraphs is i mportant for effective use of the 4085M.
  • Page 34 Mod el 4085M Section Table 3-1 . M easurement Ports of the 4085M Port No . · Port NaJIle Measurement Unit current measurements S�1U Port General measurements Port SMU 1 , 2 , 3 , measurements Port General General measurements Port voltage s ource...

  • Page 35: Pin Boards

    Section Model 4085M 3-12. Pin Boards 3-13. The 4085A can be equipped with up to 48 pin boards, each having o. n e set of m easurement pins-SENSE, FORCE, and GUARD. Refer to paragraph ·�-IO for the function of each pin. .connection between the ports and m easurement pins is·...

  • Page 36: Relationship Between Ports And Relays

    Section Model 4085M Table 3-2. Relationship Between Ports and Relays Port N o . (Name) Relay n o , Kl l , Port (SMUI) (SMU2) K20, K;;O, (s�nJ3) (SMU4) K40 , (VSl) KSO,. (VS2) K60 , (VMl) K81 , K80 , (�j2) K90, KSl ,...

  • Page 38: How To Connect Test Samples

    Section Model 4085M 3-20. How To Connect Test Samples 3-21 . Measurement is made at the m easurement pins of the 4085A, either through the 1 6072A Personality Board, which attaches to a wafer prober, or through one of th' e system , test fixturll$, which mount on the 40Q5A.

  • Page 39: Control Software

    U nless HP or Y H P specifically grants a customer the right to reproduce copyrighted materials, these may not be copied except ·...

  • Page 40: Software Disc

    3-33. H P-lE ADDRESS 3-34. Set the HP-IB addresses of the 4084A and 4145A as listed in Table 3-3. If an interface other than the com puter's internal interface (select code 2) is used, or if an HP-IB address listed in Table 3-3 cannot be used for the 4084A and 4145A, the furnished software must be m odified.

  • Page 41: Programming

    4. Change the num erical values on lines 1 1 0 and 1 20 to the desired select code and addresses (select code x 1 0 0 address). Example : The 4145A is set to address 2 3 and is connected to an additional HP-IB interface card whose select code 1 1 0...

  • Page 42: Swm Subprogram

    M odel 4085M Section IJI Run the Start subprogram included i n the S W M file. The Start subprogram m ust be executed after the computer and instruments are first turned on, (2) after the SCRATCH A or SCRATCH C comm and is . executed, and (3) after a program that does not contain any SWM subprograms is executed.

  • Page 43: Programming Examples

    Model 4085M Section Port address functions : . These functions each return the address of the specified port number. They are port address param eter and ·Connect_th used Connect subprograms. Table 3-4. lists the port address functions. Table 3-4. Port Address Functions . Port* Port Address Function...
  • Page 44 Model 4085M Section 2 0 ' SAMP LE PROGRAM NTE GER Bas e , Co l l e c t o r , Em i � l e r C o l l e c t o r - 2 Em i t te r - 3 1 0 0 Con nec t ( F N S m u ( I ) , Bas �...

  • Page 46: Sample Program For Measuring A

    Model 4 0 8 5 M Section SAMPLE PROGRAM � N TEGE R Gat e_ca m . SOllr ce._c ·c'",·. [l r a l n_ : . O ra l Tl_2 0 ral n:"3 G a t e com = 1 S o urce c o m = 5 Oral n 1=2 D ral n=2 = 3...

  • Page 47: How To Link Swm Subprograms

    Section 1II M odel 4085M 3-44. How To Link S W M Subprograms To use any of the S WM sub programs, you must link them to the end of y,our program. There are three w ays to accomplish this. ( 1 ) LOADSUB Sub_name From "SW M "...

  • Page 48: Connection Status Display

    Each variable declared in the S W M C O M block is described below. Dcs : Integer variable for the HP-lE select code and address of the 4145A. This variable is defined as 7 1 7 , but it can be changed as described in paragraph- 3-32.

  • Page 49: Manual Operation Of 4085M

    Section M odel 4085M This sample program allows the user to manually connect or disconnect ports and m easurement pins using the softkeys. Connection status is displayed ,on the CRT of 1 4 5 A are also featured in thi s the computer.
  • Page 50 5 1 0 and 5 4 0 . Lines 420 to 4 9 0 : Selects the 4 1 4 5 A's PLOT or P R I N T function, and determines the proper HP-IB address of the peripheral device. Sets higher priority...

  • Page 51: Programming Reference

    Section III M odel 4085M 3-49. PROGRA M M I N G REFERENCE " 3-50. This pargraph contains an alphabeti cal listing of the subprogra ms contained in the 4 0 8 5 M's software that can be called by user-writte n programs. Each"...

  • Page 52: Connect

    4 145A Control �!ode Status After Connect Subprogram MEASUREMENT : STOP LOCAL AUTO SEQ: STOP REMOTE and System Mode - HP-IB STATUS : LOCAL to 4 : Voltage source , 20V range , OV Output , 10llA Compliance. REMOTE and User Mode...

  • Page 53: Conneclth

    Section lodel 4085 M ConnecLth This subprogram connects the specified port to a range of m easurement pins. last first POrt addres!> pin number pin number Range Restrictions Item Description port address integer express i on 0 , port address functions 4 8 , first pin number integer expression...

  • Page 54: Fngsmu

    Section m Mode1 4 0 8 5 M FNGsmu FNport . FNSmu FNV m F� 'These functions return the port address of the specified port. FNGsmu port nUDber FNPort port numberl-0- FNSmu port number � FNVm port number FNVs Description Range Restriction Item through...

  • Page 55: Start

    This subprogram also disconnects all port-to-pin connections. The HP-lE address settings in this subprogram can be changed by the user. Refer to paragraph 3-32. Also, the COM block variables can be used in user-written subprograms. Refer to paragraph 3-46. 3-28...
  • Page 56 M odel 4 0 8 5 M Seetion m Swm _ clear This subprogram disconnects all m easurement-ports from the m easurement pins. Sw m_clear S e m a n t i c s When this subprogram i s executed, the 4 l 4 5 A i s set to one o f the states listed in Table 3-5.
  • Page 57 · ' Section 1II M odel 4085M Swm _ status This subprogram displays connection status measurement ports measurement pins on the CRT of the computer. Swm_status S e m a n t i c s Connection status is displayed as shown in the figure belo w . The meaning o f each symbol on the connection status display is explained in Figure 3-1 2 .

  • Page 58: Error Messages

    Section III Model 4085M 3-5 1 . ERROR MESSAGES 3-52. The following is a listing of all SWM-related error -messages. - A brief explanation of each error message is given, along with instructions on how to recover from the error. For the m eanings of BASIC-related errors, refer to the computer m anual.

  • Page 59: Diagnostics And Maintenance

    Model 4085M Section IV SECTIO N IV D IAGN OSTI CS M AINTE NAN CE a n d 4-), I N TRODUCTION This section provides complete information on the failure diagnostics program 4-2. included in the 4085 M software. Included are instructions on how and when to run the program , descriptions of the tests performed by the program, and discussions on what to do if the program detects a system failure.

  • Page 61: Relay Test Adapter Mounting

    Section IV Model 4085M 4-1 1 . RELAY TEST 4-1 2. The Relay Test checks all relayS on all the pin boards installed in the 4085A for normal MAKE/BREAK operation. The check is performed by applying a dc voltage t'1 the 1 6075A Relay Test -Adapter and measuring the voltage obtained when a specified relay is set to M AKE.

  • Page 62: Relay Test Failure

    M odel 4085M lection Note The relay Test checks the relays of all pin boards installed in the 4085A. At least five pin boards, arranged in . any configuration, m ust be installed in the 4085A. (4) The test result, OK or ERROR, will appear in the test result table displayed on the CRT of the computer.

  • Page 63: Dc Leak Test

    Section IV Model 4085M 4-1 3 . DC LEAKAGE TEST 4-14. The DC Leakage Test checks for excessive leakage current . in the 4085A. Two tests-OPEN TEST and SHORT TEST-are performed. ( 1 ) OPEN TEST: Sets all relays on all pin boards to BREAK and m easures leakage current. (2) SHORT TEST: Checks the level of current m easured by an S M U connected to m easurem ent pins.

  • Page 64: Error Messages

    Model 4085M Section IV (3) If the 4085A fails the Leakage Test, an error message, along with the number of the defective port or measurement pin, will appear on the computer's screen as shown in Figure 4-5. Refer to paragraph 4-17 for error handling instru ctions .

  • Page 65: Pin Board Replacement

    Test Adapter is securely fastened to the 4085A, then press softkey Dill (RETRY). If the same error at the same location is displayed, contact the nearest HP Service Office. If e mergency repair is necessary, replace the defective pin board. See paragraph 4-1 9 for details on pin board replacement.

  • Page 67: Pin Board Removal

    Model 40S5M Section IV Attach to soldering surface Figure. 4-9. Pin Board Handling Figure 4-7. Pin Board Removal 42 • • • • • • • • · 32 board No. � 8 • • • • • • • Figure.

  • Page 68: Stuck Relay Recovery

    Refer to paragraph 4-19 for instructions on pin board replacement. Contact ' ,i ' - I (for pin) " 16320-61601 Relay Number HP Part Number Figure 4-1 0. Relay Locations 4-1 0...

  • Page 69: Cleaning

    M odel 4085M � . " " 4-23. CLEA N I N G " 4-24. To maintain the system's low current m easurement capability, . the pin boards, " , � measurement pins, test fixtures, and exposed signal lines must be kept extrem ely c�ean. If the system is operating in a clean room, where air purity is high and where personnel .
  • Page 70 ' - Th� . · · supplement s important infonma!;;'" Improveme nts mada after the TO� - ;; : l-his ;$' u ��ie� n ti' � ; > • • �. � � < . : ERRATA " � eorrec.tlO ns. -Make all Make an appropriate serial number rel4tad .•..
  • Page 71 :: � �: ;: . : . :) : : ; � . / : ' � ��'�.� � ' � � � . :t� ;�'\: ::l:;: HP9 000 ·Sen es 200 or 300 HP Model 981 6 or 9836 . 'i-.. : . , ","...

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