Compliance With Semi-F47 Standard; Setting Method; Behavior - Mitsubishi Electric MELSERVO-J5 User Manual
Ac servo system
Hide thumbs
Also See for MELSERVO-J5:
- User manual (478 pages) ,
- Sample screen manual (128 pages) ,
- Introduction manual (112 pages)
Table of Contents
Advertisement
4.2
Compliance with SEMI-F47 standard
This function complies with "SEMI-F47 semiconductor process equipment voltage sag immunity test". With this function, even
when an instantaneous power failure occurs during operation, the occurrence of [AL. 010 Undervoltage] can be avoided by
using the electrical energy charged in the capacitor.
• Use a 3-phase power supply for the input power supply of the servo amplifier. Using a 1-phase 200 V AC for
the input power supply will not comply with SEMI-F47 standard.
Precautions
• For MR-J5D_-_G_, this function cannot be used.
• Although the control circuit power supply of the servo amplifier can comply with SEMI-F47 standard, depending on the
power supply impedance and operating situation, a back-up capacitor may be required for instantaneous power failure in
the main circuit power supply.
• The external dynamic brake cannot be used when complying with the SEMI-F47 standard. Do not assign DB (Dynamic
brake interlock) to the output device. If DB is assigned, the servo amplifier switches to servo-off status when an
instantaneous power failure occurs.
• Perform an actual machine test and a detailed check of the equipment for the SEMI-F47 power instantaneous power failure
standard.
Setting method
Setting [Pr. PA20.2 SEMI-F47 function selection] to "1" (enabled), and [Pr. PF25 SEMI-F47 function - Instantaneous power
failure detection time (Instantaneous power failure tough drive detection time)] to "200" [ms] enables the SEMI-F47 standard
compliant function.
Servo
Symbol
parameter
PA20.2
*TDS
PF25
CVAT
Behavior
When the SEMI-F47 standard compliant function is enabled, the operation will be as follows:
• When the control circuit power supply voltage continues for 200 ms at the rated voltage × 50 % or less, [AL. 010.1 Control
circuit supply voltage drop] occurs.
• [AL. 010.2 Voltage drop in the main circuit power] will occur when bus voltage is as follows.
Servo amplifier
MR-J5-10_ to MR-J5-700_
MR-J5W_-_
MR-J5-60_4_ to MR-J5-350_4_
• MBR (Electromagnetic brake interlock) turns off when [AL. 010.1 Voltage drop in the control circuit power] occurs.
4 APPLICABLE FUNCTIONS
210
4.2 Compliance with SEMI-F47 standard
Name
SEMI-F47 function selection
SEMI-F47 function - Instantaneous
power failure detection time
(instantaneous power failure tough
drive detection time)
Outline
Enable or disable the SEMI-F47 function.
0: Disabled (initial value)
1: Enabled
Set the time until the occurrence of [AL. 010.1 Voltage drop in the control circuit power].
Initial setting: 200 [ms]
Bus voltage which triggers alarm
DC 158 V
DC 380 V
Advertisement
Table of Contents
